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1. GENERAL REQUIREMENTS
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I. Vendors must comply with all the requirements specified in this tender document
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II. Vendors must bear all costs of supplying the specified quantity of items to UiTM. Such costs shall include the costs of delivery, installation, commissioning, training, troubleshoot and maintenance work (including parts labour and on-site service) within the specified warranty period
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2. GENERAL SPECIFICATION
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I. High precision and alignment photolithography exposure system
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II. The system should utilize the pattern transfer shadow method with high-accuracy alignment
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III. Minimum sample size up to 4 inches in diameter
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IV. Sample holder to accommodate maximum to minimum size of samples
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V. Adjustable mask holder to cater various mask sizes
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VI. Beam uniformity less than +/-3% at maximum sample size
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VII. Rigid table provided by the supplier, with size and load to accommodate mask aligner and accessories for process resolution of 3 µm or better.
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VIII. UV 365 nm wavelength source type.
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IX. The system should come with vacuum contact, hard contact, soft contact, and proximity exposure modes.
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3. SYSTEM SPECIFICATION
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I. System should come with the standard features
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A ) Maximum sample size of 4 inches or smaller
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B ) Adjustable multi mask holder to accommodate selective pattern exposure.
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C ) Micrometer alignment tool for all axes including theta
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D ) Z-axis gap digital display
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II. Mask Aligner light source I-Line with the following
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A ) UV 365 nm wavelength source type. Please specify the source type.
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B ) Beam intensity at least 22 mW/cm2 or higher
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C ) Beam diameter at least 125 mm or better
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D ) Uniformity of at least 3 % across 125 mm. Supplier to measure the uniformity during acceptance
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E ) Integrated UV Meter in the system
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III. System should comes with the following microscope
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A ) Dual CCD zoom microscope for alignment, etc
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B ) Independent dual moving stage for both microscope
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C ) Dual Monitor provided with magnification up to 480X or better
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IV. Stage and Controller:
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A ) Exposure timer up to 999 hours or better
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B ) Independent stage movement of +/-5 mm for X, Y or better
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C ) Stage theta +/-5 degree or better
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D ) All contact modes provided such as Proximity, Vacuum, Hard, Soft, and or both
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E ) Vacuum for substrate, mask, chuck, and contact
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V. System should able to deliver process resolution of the following
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A ) Typical vacuum contact resolution at 1µm or better
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B ) Hard Contact resolution of at least 2 µm or better
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C ) Soft Contact resolution at least 3µm or better
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D ) Proximity resolution of at least 5 µm or better
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E ) Suppliers need to demonstrate the process resolution acceptance during commissioning. All wafer and photoresists, developer, and stripper are to be provided by the supplier during the demonstration
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VI. Mask Aligner should comes with at least 3 years preventive maintenance. This should include lens cleaning, exposure alignment, O-Ring cleaning and etc every year.
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VII. Vendor must provide manual dispenses 6-inch spin coater or better.
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VIII. Supplier need to provide the following consumables
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A ) At least 1 gallon PR with shelf life of 2.5 years or better.
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B ) Compatible resist developer to be provided.
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C ) At least 2 gallon resist developer with shelf life of 2.5 years or better.
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D ) Pattern Soda Lime photomask with resolution of 10 µm or better.
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E ) At least total of 3 photomasks be provided.
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IX. The spin coater should meet the following
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A ) Touch Screen Human-Machine Interface or better
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B ) Programmable Coating with speed from 100rpm~10,000rpm
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C ) Spin accuracy at least 1% or better
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D ) Spin accuracy at least 1% or better
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E ) The system should be able to hold at least 50 recipe with 50 step or better
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F ) Programmable timer up to 999.9 sec or better
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G ) Ideally the bowl size up to 8 inch or better
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H ) Sample size from 10mm up to 6inch or better
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I ) Supplier should provide variety of chuck for varies sample size
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J ) Ideally the system made from stainless steel with industrial servo motor.
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K ) An oil-less vacuum pump should be provided
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4. CATALOGUES/BROCHURES
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I. Vendors must provide the catalogues / brochures / technical specification manuals with the tender proposal
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II. Original copies of user and operational manual of the equipment must be provided
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5. TRAINING
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I. Vendors are required to provide training for the use, maintenance and troubleshoot of the equipment to the Technical Staff & Lecture of Electrical Engineering School, College of Engineering, UiTM Shah Alam and all training-related costs are borne by the Vendors.
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II. A minimum of three (2) days training for a minimum of five (5) participants covering each module. (Vendors must provide details/syllabus of the training module)
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III. Complete training materials and documentation must be provided to all participants
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IV. The training MUST be conducted by trainers who are certified by principal. Please attach the trainer's certification that is certified by principal Vendors.
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V. Training certificates must be provided by the Vendors.
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6. WARRANTY AND SUPPORT
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I. Vendors must have local service for repair services and provide on call services when required by UiTM
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II. Vendors must provide details of warranty. INCLUDING ALL parts, labour, basic phone support for hardware issue, repairs onsite). Please attach the Letter of Warranty (LOW) from the principle, which states that UiTM is entitled to 3 years of warranty upon project completion.
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III. Vendors be responsible for the installation, commissioning and test-run of the equipment and accompanying software (if applicable) to the satisfaction of UNIVERSITI TEKNOLOGI MARA before final acceptance.
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IV. All cost on delivery. installation, commissioning, test run and training shall be borne by the vendors.
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Tidak
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V. The vendors MUST provide a genuine product. The vendors must be supported back-to-back by a principle (manufacturer) to provide maintenance services for equipment supplied. The vendors should attach a Letter of Authorization (LOA) from Distributors/ Principal.
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VI. Free support through fax, email, telephone must be provided during the warranty period
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7. OTHER REQUIREMENTS
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I. Note that all other related material, components and cabling, which are required to ensure full operation of the above package must be supplied and borne by vendors
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